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Detection of Defect Patterns on Wafer Bin Map Using Fully Convolutional Data Description (FCDD)
Seung-Jun Jang
, Suk Joo BaeJournal of Korean Society of Industrial and Systems Engineering :: Vol.46 No.2 pp.1-12
DOI:https://doi.org/10.11627/jksie.2023.46.2.001
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