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A Study of Developing Wear Tester to Measure and Minimize Particle Levels in Cleanroom

Sung Ho Chang^*†, Kwang Hee Park^*, Kwonhak Noh^**, Jonghwan Lee^*, Young Cheul Cha^*, Hae Dong Chun^*

Journal of Korean Society of Industrial and Systems Engineering :: Vol.36 No.2 pp.1-7

DOI:https://doi.org/10.11627/jkise.2013.36.2.1
Open abstract

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